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Cmos Cantilever Sensor Systems: Atomic Force Microscopy and Gas Sensing Applications

D. Lange , O. Brand , H. Baltes

23 juillet 2002

160,95 $

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Description

Langue

anglais

Pages

142

Microtechnology and MEMS

Publié par: Springer/Sci-Tech/Trade

Dimensions à l’expédition: 9" H x 6" W x 1" L

ISBN: 9783540431435

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