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Fundamental Aspects of Ultrathin Dielectrics on Si-based Devices/en-ca/fundamental-aspects-of-ultrathin-dielectrics-on-si-based-devices/2CE58B85-7174-4EFA-A032-C78453D9EAC3.html2CE58B85-7174-4EFA-A032-C78453D9EAC3
Fundamental Aspects of Ultrathin Dielectrics on Si-Based Devices